Nyoptics Inc 2014 -
Motorized XYZ Inspection System
Configurable Motorized Inspection system for semiconductor or biomedical industry.
APPLICATIONS
- Semiconductor
- Biomedical
- Industrial Inspection custom applications
- MEMS, Pressure sensors, Die
Ideal choice for:
- Wafer cut die inspection
- Wafer general inspection
- General semiconductor inspection
- General Biomedical inspection
- Biomedical gel tray and slide inspection
FEATURES
- OPTICS Selections:
- High power zoom: manual or motorized
- Fixed optics: single or nosepiece
- Macro, micro, microzoom
- LWD (long working distance versions)
- Inspection methods:
- Brightfield
- Darkfield
- Nomarski DIC
- Near-
IR - Phase Contrast
- UV
- 10x/24, 15x/16, 20x/12
- Objective choices:
- Plan Achromat 1.0x / WD = 183mm
- Plan Achromat 0.5x / WD = 183mm
- Plan Achromat 0.5x / WD = 183mm
- Plan Achromat 1.0x / WD = 183mm
- Plan Achromat 1.0x / WD = 183mm
- Fully motorized X, Y, Z, theta:
- XY stage travel 4x4, 6x6, 8x8, 12x12, more
- Theta alignment rotation ±30°
- Step resolution to 39nm
- Computer, Keypad, or Joystick operation
DOWNLOAD Spec sheet
Nyoptics offers a wide range of motorized inspection systems for semiconductor and biomedical companies. The systems are fully configurable for many industries with precision 39nm resolution motion control. Stage motion for X, Y, Z, theta are via customizable computer control recipes and joystick.
We offer many illumination options: Visible/NIR transmitted and reflected (ideal for MEMS inspection), co-
Our motorized inspection systems are available with adjustable height table surfaces with radiused front edges for operator comfort and efficiency. The motorized motion is quiet and smooth, allowing operators to find the correct working position to eliminate fatigue.
All systems are designed and built in the USA using only the finest materials and USA sourced components for a proven high reliability record.
We offer many optional systems and accessories to complete the package, from LED custom lighting to microscope and optical systems for inspection, rework, and micro-
OPTIONS
- Viewing options:
- Simultaneous wafer topside/bottom viewing
- Topside only
- Bottom-
side only - Custom C-
mount couplers available
- Fluorescence Modules
- Specify wavelengths
- 10x/24, 15x/16, 20x/12
- Options :
- Inker control
- 180° swing away
- Does not permit ring light mounting
- Illumination:
- Transmitted / reflected white light
- Transmitted / reflected NIR
- More durable than extended eyepiece tubes
- Use for proper ergonomic position
- Ideal for large wafer inspection
6” capable simultaneous view IR transmitted and BF topside wafer inspection system.
MADE in USA